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Inductive Encoder Chip integrated inside a Nanostage

Nano Stages or Piezo Drives are extensively used in optics, photonics, medical devices, life science, communication-equipment and so on. Their main feature is the very small step size in the nanometer range, which requires a miniature encoder with a very high resolution . Often optical encoders are used, but they have 2 main drawbacks: they generate light and they require quite a lot of space. An inductive encoder chip does not generate light, has a very low profile (2 mm for encoder chip and scale or disc) and has a resolution down to 20 nm. These features make the POSICoder highly suited for application in nano stages. Consquently, POSICoder's inductive encoder chips are widely used by nano-stage manufacturers in Europe, USA and Asia.

Nanostage with an inductive encoder chip inside for position feedback
Nanostage with an inductive encoder chip inside for position feedback

Which encoder chip is the best candidate for application in nano-stages and piezo-drives?

The PO1030 high speed encoder chip is most suited because it not only has the highest speed, but also the lowest jitter and best repeatability, which are important characteristics for controlling sub-micrometer movements .



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